Shibaura Machine SR-404HC Overview
The Shibaura Machine SR-404HC is a Class 100 cleanroom wafer transfer robot with a 400 mm arm, 100 mm vertical stroke, 20 kg maximum payload and ±0.05 mm repeatability.
Key Specifications
Specification | Shibaura Machine SR-404HC |
Manufacturer | Shibaura Machine |
Model | SR-404HC |
Category | Robot arm / Wafer transfer robot |
Cleanliness | Class 100 |
Arm length | 400 mm (200 + 200 mm) |
Working range | Axis 1 ±230°; Axis 2 ±160°; Z 100 mm; Axis 4 ±230° |
Max speed | Axis 1 274°/s; Axis 2 240°/s; Z 200 mm/s |
Max payload | 20 kg |
Repeatability | X/Y ±0.05 mm; Z ±0.05 mm; Axis 4 ±0.1° |
Weight | 200 kg |
Drive | AC servo; absolute encoder |
Controller | TS3000 |
Price | Price on request |
Price available on request. Any price is indicative, not final and may change.
Applications
Wafer Transfer
Clean Production
Substrate Handling
Shibaura Machine SR-404HC Review Summary
The SR-404HC is built for cleanliness and wide rotation rather than speed. It is rated for Class 100 clean rooms, and its two 200 mm arm links rotate ±230 and ±160 degrees with a ±230 degree wrist, which lets it reach several stations. Vertical travel is 100 mm. It carries up to 20 kg and repeats to ±0.05 mm. AC servos with absolute encoders drive the axes, and the 200 kg body gives stability. It runs on the TS3000 controller.
Pros
Class 100
Wide joint ranges
20 kg
Absolute encoders
Cons
200 kg body
Moderate speeds
±0.05 mm
Who It Is For
It fits semiconductor and electronics plants needing clean transfer of wafers and carriers.
Full review: Shibaura Machine SR-404HC Review: Specs and Uses of the Class 100 Wafer Transfer Robot
