Shibaura Machine SR-404HC Review: Specs and Uses of the Class 100 Wafer Transfer Robot

The Shibaura Machine SR-404HC is a special-purpose robot for moving semiconductor wafers in a clean room. The manufacturer does not publish a price. This review covers its specifications, features and uses.

Quick Verdict

The SR-404HC is built for cleanliness and wide rotation rather than speed. It is rated for Class 100 clean rooms, and its two 200 mm arm links rotate ±230 and ±160 degrees with a ±230 degree wrist, which lets it reach several stations. Vertical travel is 100 mm. It carries up to 20 kg and repeats to ±0.05 mm. AC servos with absolute encoders drive the axes, and the 200 kg body gives stability. It runs on the TS3000 controller.

Shibaura Machine SR-404HC at a Glance

• Cleanliness: Class 100

• Arm length: 400 mm (200 + 200 mm)

• Working range: Axis 1 ±230°; Axis 2 ±160°; Z 100 mm; Axis 4 ±230°

• Max speed: Axis 1 274°/s; Axis 2 240°/s; Z 200 mm/s

• Max payload: 20 kg

• Price: on request

Shibaura Machine SR-404HC Technical Specifications

The table below lists what the manufacturer states.

Specification	Shibaura Machine SR-404HC
Manufacturer	Shibaura Machine
Cleanliness	Class 100
Arm length	400 mm (200 + 200 mm)
Working range	Axis 1 ±230°; Axis 2 ±160°; Z 100 mm; Axis 4 ±230°
Max speed	Axis 1 274°/s; Axis 2 240°/s; Z 200 mm/s
Max payload	20 kg
Repeatability	X/Y ±0.05 mm; Z ±0.05 mm; Axis 4 ±0.1°
Weight	200 kg
Drive	AC servo; absolute encoder
Controller	TS3000

Design and Build Quality

The heavy base and wide joint ranges suit a fixed position serving several process stations.

Software and Integration

TS3000 Controller

Up to 5 axes, 4 standard.

Cabling

5 m standard, up to 30 m.

Shibaura Machine SR-404HC Applications and Use Cases

Wafer Transfer

Between process equipment.

Clean Production

Class 100 environments.

Substrate Handling

Heavier carriers up to 20 kg.

Shibaura Machine SR-404HC Price and Value

Shibaura Machine does not publish a price for the Shibaura Machine SR-404HC; it is quoted on request.

For the company behind the product, read the Shibaura Machine Company Profile: History, Businesses, Financials and Stock.

Pros and Cons

Pros

• Class 100

• Wide joint ranges

• 20 kg

• Absolute encoders

Cons

• 200 kg body

• Moderate speeds

• ±0.05 mm

• No published price

Who Should Buy the Shibaura Machine SR-404HC?

It fits semiconductor and electronics plants needing clean transfer of wafers and carriers.

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Shibaura Machine SR-404HC FAQ

How much does the Shibaura Machine SR-404HC cost?

Shibaura Machine does not publish a price for the Shibaura Machine SR-404HC; it is quoted on request.

What is the Shibaura Machine SR-404HC?

A Class 100 cleanroom wafer transfer robot.

What is its arm length?

400 mm in two 200 mm links.

What payload does it carry?

Up to 20 kg.

How precise is it?

±0.05 mm.

What is the vertical stroke?

100 mm.

How heavy is the robot?

200 kg.

Which controller does it use?

TS3000.

Specifications are based on manufacturer information and may change.