PI V-551 Direct-Drive Linear Stages
PI V-551 combines an ironless linear motor with crossed-roller guidance and linear position feedback. The product description lists incremental encoder resolution of 0.2 nm, absolute encoder resolution of 2 nm and minimum incremental platform motion of 0.5 nm under the relevant conditions.
Key Specifications
Specification | Details |
Family | V-551 |
Drive | Ironless linear motor |
Guidance | Crossed roller with anti-creep cage assist |
Guiding reference | 1 µm straightness/flatness per 100 mm |
Incremental encoder resolution | 0.2 nm |
Absolute encoder resolution | 2 nm |
Minimum incremental motion reference | 0.5 nm at the platform |
Engineering Assessment
A relevant precision stage for smooth scanning and fine positioning. Encoder resolution, minimum incremental motion and absolute accuracy are different specifications and should not be presented as interchangeable.
Applications
Optical inspection, metrology, photonics and semiconductor test equipment.
Industries: Manufacturing and automation
Price and Configuration
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