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PI (Physik Instrumente) LP

PI V-551 Direct-Drive Linear Stages

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PI V-551 Direct-Drive Linear Stages

PI V-551 Direct-Drive Linear Stages manufacturer product image

PI V-551 combines an ironless linear motor with crossed-roller guidance and linear position feedback. The product description lists incremental encoder resolution of 0.2 nm, absolute encoder resolution of 2 nm and minimum incremental platform motion of 0.5 nm under the relevant conditions.

Key Specifications

Family

V-551

Drive

Ironless linear motor

Guidance

Crossed roller with anti-creep cage assist

Guiding reference

1 µm straightness/flatness per 100 mm

Incremental encoder resolution

0.2 nm

Absolute encoder resolution

2 nm

Minimum incremental motion reference

0.5 nm at the platform

Applications and Industries

Optical inspection, metrology, photonics and semiconductor test equipment.

Manufacturing and automation

Review Summary

Consider PI V-551 Direct-Drive Linear Stages for optical inspection, metrology, photonics and semiconductor test equipment. Establish the required operating point and installation interfaces before choosing the configuration, and use a representative loaded cycle as the acceptance basis. Resolution is not overall accuracy. Load and environment influence the useful result.

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Price and Configuration

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