Shibaura Machine SR-404HC
The Shibaura Machine SR-404HC is a Class 100 cleanroom wafer transfer robot with a 400 mm arm, 100 mm vertical stroke, 20 kg maximum payload and ±0.05 mm repeatability.
The SR-404HC is built for cleanliness and wide rotation rather than speed. It is rated for Class 100 clean rooms, and its two 200 mm arm links rotate ±230 and ±160 degrees with a ±230 degree wrist, which lets it reach several stations. Vertical travel is 100 mm. It carries up to 20 kg and repeats to ±0.05 mm. AC servos with absolute encoders drive the axes, and the 200 kg body gives stability. It runs on the TS3000 controller.
Pricing is available on request. Any price is indicative only, is not final and may change; contact us for a confirmed quote.
Full review: Shibaura Machine SR-404HC Review: Specs and Uses of the Class 100 Wafer Transfer Robot
- Cleanliness: Class 100
- Arm length: 400 mm (200 + 200 mm)
- Working range: Axis 1 ±230°; Axis 2 ±160°; Z 100 mm; Axis 4 ±230°
- Max speed: Axis 1 274°/s; Axis 2 240°/s; Z 200 mm/s
- Max payload: 20 kg
- Repeatability: X/Y ±0.05 mm; Z ±0.05 mm; Axis 4 ±0.1°
- Weight: 200 kg
- Drive: AC servo; absolute encoder
- Controller: TS3000
- Price: Price on request
