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UMV – Vacuum G2 series

UMV – Vacuum G2 series

Generation 2 vacuum ironless linear motor series is designed with the unique challenges of vacuum applications in mind and based on years of collaboration with high-end semiconductor manufacturers. The portfolio is suitable for even the strictest vacuum requirements with a large force range. The UMV coils are the smallest coils in the vacuum-rated linear motor series. Specifically suitable for low loads and tight spaces because of the short length. This motor is ideal for positioning e.g. in gantries, or high dynamic, light weight applications which require extreme accuracy.

Review Summary

Consider Vacuum G2 when a semiconductor, inspection or display process needs the motor inside the vacuum chamber and the machine designer can qualify heat removal, cleanliness and motion together. The decisive sizing question is the actual cooling arrangement. Active-cooled continuous-force headlines can be several times the passive-cooled rating, so a high peak-force number is a poor substitute for a complete thermal design.

Variant configurationUMV3S/UMV6S/UMV12N/S G2

Applications and Industries

Industrial machine and automation integration

Industrial automation

Request a quote for the exact configuration,quantity and delivery schedule.

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Variant configuration UMV3S/UMV6S/UMV12N/S G2
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