Tecnotion UMV, ULV and UXXV G2 Vacuum Linear Motors
Tecnotion UMV, ULV and UXXV G2 Vacuum Linear Motors
Tecnotion Vacuum Generation 2 is an ironless linear-motor range with vacuum-compatible coil units and magnet yokes. UMV, ULV and UXXV serve different force and packaging requirements, using enclosed stainless-steel coil assemblies and coated magnet structures. They are direct-drive motor components for a separately engineered motion stage, rather than complete guided positioning systems.
Review Summary
Consider Vacuum G2 when a semiconductor, inspection or display process needs the motor inside the vacuum chamber and the machine designer can qualify heat removal, cleanliness and motion together. The decisive sizing question is the actual cooling arrangement. Active-cooled continuous-force headlines can be several times the passive-cooled rating, so a high peak-force number is a poor substitute for a complete thermal design.
Architecture Ironless three-phase synchronous linear motor; coil unit and matching permanent-magnet yoke; external guidance, feedback and servo amplifier UMV3S / UMV6S G2 Peak 100 / 200 N; passive continuous 5.9 / 10.8 N; active continuous 22 / 44 N UMV12N / UMV12S G2 Peak 400 / 401 N; passive continuous 20 / 20 N; active continuous 86 / 87 N ULV9N / ULV9S G2 Peak 720 / 719 N; passive continuous 41 / 41 N; active continuous 164 / 165 N UXXV6N / UXXV9N / UXXV9S / UXXV18N G2 Peak 1340 / 2010 / 2012 / 4020 N; passive continuous 64 / 94 / 94 / 184 N; active continuous 233 / 349 / 350 / 698 N Passive thermal basis Typical application thermal resistance and a 40°C vacuum-chamber wall; actual conditions affect the rating Active thermal basis 0.02 K/W mounting-path thermal resistance and 20°C mounting surface at continuous current Peak thermal basis 20 K/s temperature rise, magnets at 25°C; transient rating Maximum coil temperature 80°C in the compared tables; all catalog specifications ±10% Temperature protection Tables list three PTC elements and one NTC sensor; confirm wiring and actual protection implementation Maximum voltage rating 230 VAC RMS phase-to-phase (325 VDC in the catalog); available speed depends on bus voltage Vacuum scope Manufacturer specifies compatibility down to 10⁻⁸ mbar; complete-chamber pressure and cleanliness remain application-dependent Price Request a quote for exact coil, winding, yokes, cleaning and acceptance scope Applications and Industries
Tecnotion identifies semiconductor equipment, lithography, inspection, display production, science and aerospace as application areas for the Vacuum G2 range. UMV suits lighter and space-constrained mechanisms; ULV targets medium-force dynamic axes; UXXV addresses higher-force duties such as display equipment. These are selection boundaries, not claims that a particular completed machine has been tested by ATC.
Industrial automation
Request a quote for the exact configuration,quantity and delivery schedule.
| Architecture | Ironless three-phase synchronous linear motor; coil unit and matching permanent-magnet yoke; external guidance, feedback and servo amplifier |
| UMV3S / UMV6S G2 | Peak 100 / 200 N; passive continuous 5.9 / 10.8 N; active continuous 22 / 44 N |
| UMV12N / UMV12S G2 | Peak 400 / 401 N; passive continuous 20 / 20 N; active continuous 86 / 87 N |
| ULV9N / ULV9S G2 | Peak 720 / 719 N; passive continuous 41 / 41 N; active continuous 164 / 165 N |
| UXXV6N / UXXV9N / UXXV9S / UXXV18N G2 | Peak 1340 / 2010 / 2012 / 4020 N; passive continuous 64 / 94 / 94 / 184 N; active continuous 233 / 349 / 350 / 698 N |
| Passive thermal basis | Typical application thermal resistance and a 40°C vacuum-chamber wall; actual conditions affect the rating |
| Active thermal basis | 0.02 K/W mounting-path thermal resistance and 20°C mounting surface at continuous current |
| Peak thermal basis | 20 K/s temperature rise, magnets at 25°C; transient rating |
| Maximum coil temperature | 80°C in the compared tables; all catalog specifications ±10% |
| Temperature protection | Tables list three PTC elements and one NTC sensor; confirm wiring and actual protection implementation |
| Maximum voltage rating | 230 VAC RMS phase-to-phase (325 VDC in the catalog); available speed depends on bus voltage |
| Vacuum scope | Manufacturer specifies compatibility down to 10⁻⁸ mbar; complete-chamber pressure and cleanliness remain application-dependent |
| Price | Request a quote for exact coil, winding, yokes, cleaning and acceptance scope |
