PI Q-522 Q-Motion Miniature Linear Stages: Legacy Selection
PI Q-522 Q-Motion Miniature Linear Stages: Legacy Selection
Q-522 is a miniature linear-stage family using a piezoelectric inertia, or stick-slip, drive. PI now states that Q-522 has been replaced by Q-521. This review therefore concerns identification and engineering of an existing Q-522 installation, with current replacement selection treated as a separate compatibility exercise.
Review Summary
Consider Q-522 information for legacy service and established compact-motion designs. The family includes open-loop and encoder versions with 6.5,13 or 26 mm travel. Do not assume that the smallest 22 ×22 ×10 mm envelope applies to every closed-loop stage or that Q-521 is a drop-in spare.
Lifecycle PI identifies Q-521 as replacement Travel choices 6.5 mm,13 mm or 26 mm Drive Piezoelectric inertia / stick-slip motor Feedback Open-loop or optical incremental encoder; exact variant Encoder resolution 4 nm or 1 nm for specified sensor variants Minimum incremental motion 8 nm or 2 nm in corresponding closed-loop variants Vacuum scope Specified high-vacuum/UHV constructions; reduced operating duty applies Applications and Industries
Legacy miniature positioning in photonics, microscopy, microassembly and semiconductor/test equipment.
Industrial automation
Request a quote for the exact configuration,quantity and delivery schedule.
| Lifecycle | PI identifies Q-521 as replacement |
| Travel choices | 6.5 mm,13 mm or 26 mm |
| Drive | Piezoelectric inertia / stick-slip motor |
| Feedback | Open-loop or optical incremental encoder; exact variant |
| Encoder resolution | 4 nm or 1 nm for specified sensor variants |
| Minimum incremental motion | 8 nm or 2 nm in corresponding closed-loop variants |
| Vacuum scope | Specified high-vacuum/UHV constructions; reduced operating duty applies |
