PI A-322 PIglide HS Planar Air-Bearing XY Systems
PI A-322 PIglide HS Planar Air-Bearing XY Systems
A-322 PIglide HS is an XY planar scanning system combining magnetic linear motors, air bearings, a granite reference and specified digital control. PI identifies Base, Plus and Ultra performance classes. The architecture uses a flexural coupling to decouple lateral behavior between axes while preserving structural stiffness; performance is determined by the selected complete system and its calibration.
Review Summary
Consider A-322 for precision scanning and metrology where the installation can provide clean regulated air, a suitable foundation and thermal control. The supplied 350 ×500 mm,15 kg and 1 m/s figures describe a configuration scope, not every Base, Plus, Ultra or customized system.
Architecture Planar air-bearing XY positioning with magnetic direct drives Reference structure Integrated granite arrangement in identified system Classes Base, Plus and Ultra; actual specifications differ Feedback Specified absolute measuring system in current catalog description Control Matched ACS controller/drive architecture with applicable compensation Source configuration 350 ×500 mm travel,15 kg load,1 m/s overview; confirm delivered design Utilities Clean regulated air and vacuum-preload arrangement as specified Applications and Industries
Precision scanning, semiconductor inspection and metrology systems with controlled utilities and installation conditions.
Industrial automation
Request a quote for the exact configuration,quantity and delivery schedule.
| Architecture | Planar air-bearing XY positioning with magnetic direct drives |
| Reference structure | Integrated granite arrangement in identified system |
| Classes | Base, Plus and Ultra; actual specifications differ |
| Feedback | Specified absolute measuring system in current catalog description |
| Control | Matched ACS controller/drive architecture with applicable compensation |
| Source configuration | 350 ×500 mm travel,15 kg load,1 m/s overview; confirm delivered design |
| Utilities | Clean regulated air and vacuum-preload arrangement as specified |
