JR Automation Semiconductor Substrate Panel Handling EFEM

JR Automation panel-handling EFEM systems load and unload semiconductor substrate panels, with application-specific configurations and communication options.
JR Automation – A Hitachi Group Company SEMICONDUCTOR SUBSTRATE PANEL HANDLING EFEM offers panels up to 600 × 600 mm as listed and configurable load/unload and factory interfaces. These capabilities make it relevant to teams evaluating semiconductor handling automation. The best fit depends on compatibility with the intended equipment, the required workflow and the resources available for integration.
Pricing is available on request. Any price is indicative only, is not final and may change; contact us for a confirmed quote.
Full specifications and product overview: JR Automation – A Hitachi Group Company SEMICONDUCTOR SUBSTRATE PANEL HANDLING EFEM
Manufacturer: JR Automation – A Hitachi Group Company